モノシラン (SiH4)

SiH4は、半導体、ディスプレイおよび太陽電池の製造工程で使用され、Si絶縁膜、Si反射防止膜を形成するときに使用されます。

  • ISO CONTAINER
  • Y-CYLINDER
  • BUNDLE
  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
SiH4 O2+Ar N2 H2 CO CO2 CH4 H2O
99.9999%
[Excluded H2]
1.0 1.0 20.0 0.1 0.1 0.1 1.0
SiH4 SPECIFICATIO
Purity SiH4 99.9999%
[Excluded H2]
Impurity
(ppmv)
O2+Ar 1.0
N2 1.0
H2 20.0
CO 0.1
CO2 0.1
CH4 0.1
H20 0.1

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 10 / 12 kg CGA/DISS632, CGA350,
JIS-22-14L etc.
Bundle Customized CGA/DISS632, JIS-22-14L etc.
Y-CYLINDER Cr-Mo Steel 100 / 125 kg
ISO Container 20ft 2,200 kg CGA/DISS632 etc.
40ft 5,500 kg
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 10 / 12 kg
VALVE CONNECTION TYPE CGA/DISS632, CGA350, JIS-22-14L etc.
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS632, JIS-22-14L etc.
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 100 / 125 kg
VALVE CONNECTION TYPE CGA/DISS632, JIS-22-14L etc.
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 2,200 kg
40ft 5,500 kg
VALVE CONNECTION TYPE CGA/DISS632 etc.