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Tungsten hexafluoride (WF6)

WF6 is used in patterning semiconductor to form metal contacts and gates.

  • INDIVIDUAL

SPECIFICATION

Unit:ppbw(metal), ppmv(gas)
SPECIFICATION : WF6, K, U, Th, Cr, Fe, Na, Mo, Al, Cu, Mg, Ni, Ca, Co, Zn, Mn, Pb
WF6 K U Th Cr Fe Na Mo Al Cu Mg Ni Ca Co Zn Mn Pb
99.9995% 10 0.1 0.1 10 10 10 25 10 10 10 10 15 10 10 10 10
SPECIFICATION : WF6, O2+Ar, N2, HF, CO, CO2, SiF4, SF6, CF4
WF6 O2+Ar N2 HF CO CO2 SiF4 SF6 CF4
99.9995% 1.0 1.0 1.0ppmw 1.0 1.0 1.0 1.0 1.0
SPECIFICATION : WF6, SPECIFICATIO
WF6 SPECIFICATIO
Purity WF6 99.9995%
Impurity K 10
U 0.1
Th 0.1
Cr 10
Fe 10
Na 10
Mo 25
Al 10
Cu 10
Mg 10
Ni 10
Ca 15
Zn 10
Mn 10
Pb 10
O2+Ar 1.0
N2 1.0
HF 1.0ppmw
CO 1.0
CO2 1.0
SiF4 1.0
SF6 1.0
CF4 1.0

CYLINDERS INFORMATION

CYLINDERS INFORMATION : TYPE, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
40L SUS 316L 50~100 kg JIS-22-14R,
CGA/DISS638 etc.
20L 25~50 kg
10L 12.5~25 kg
CYLINDERS INFORMATION : CYLINDERS INFORMATION, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
CYLINDERS INFORMATION INDIVIDUAL CYLINDER
MATERIAL SUS 316L
FILLING WEIGHT 50~100(40Li) / 25~50(20Li) / 12.5~50(10Li) kg
VALVE CONNECTION TYPE JIS-22-14R, CGA/DISS638 etc.
Purpose of use - Wafer → Substrate In (Wafer, Chamber, Heater) → Processing (Process gases) Zoom In - Semiconductor (Dielectric) WF6:Contact - WF6 is used in patterning semiconductor to form metal contacts and gates. → Substrate Out → Semiconductor (Wafer)