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Nitrogen trifluoride (NF3)

NF3 is used during the manufacturing process of semiconductor, display and PV,
as it removes residues from inner wall of the chamber after CVD manufacturing process.

  • ISO CONTAINER
  • Y-CYLINDER
  • BUNDLE
  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
SPECIFICATION : NF3, O2+Ar, N2, CF4, CO, CO2, N2O, SF6, HF, H2O
NF3 O2+Ar N2 CF4 CO CO2 N2O SF6 HF H2O
99.999% 1.0 1.0 10.0 1.0 1.0 1.0 1.0 1.0 1.0
SPECIFICATION : NF3, SPECIFICATIO
NF3 SPECIFICATIO
Purity NF3 99.999%
Impurity
(ppmv)
O2+Ar 1.0
N2 1.0
CF4 10.0
CO 1.0
CO2 1.0
N2O 1.0
SF6 1.0
HF 1.0
H2O 1.0

CYLINDERS INFORMATION

CYLINDERS INFORMATION : TYPE, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 15 / 20 / 22.7 kg CGA/DISS640, CGA330,
JIS-22-14R/L etc.
Bundle Customized
Y-CYLINDER Cr-Mo Steel 195 / 200 kg CGA/DISS640 etc.
ISO Container 20ft 4,200 kg
40ft 8,000 kg
CYLINDERS INFORMATION : 47L, SPECIFICATIO
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 15 / 20 / 22.7 kg
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
CYLINDERS INFORMATION : Bundle, SPECIFICATIO
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
CYLINDERS INFORMATION : Y-CYLINDER, SPECIFICATIO
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 195 / 200 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
CYLINDERS INFORMATION : ISO Container, SPECIFICATIO
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 4,200 kg
40ft 8,000 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.

SPECIFICATION

Unit : ppmv
SPECIFICATION : NF3, O2+Ar, N2, CF4, CO, CO2, N2O, SF6, HF, H2O
NF3 O2+Ar N2 CF4 CO CO2 N2O SF6 HF H2O
99.999% 1.0 1.0 10.0 1.0 1.0 1.0 1.0 1.0 1.0
SPECIFICATION : NF3, SPECIFICATIO
NF3 SPECIFICATIO
Purity NF3 99.999%
Impurity
(ppmv)
O2+Ar 1.0
N2 1.0
CF4 10.0
CO 1.0
CO2 1.0
N2O 1.0
SF6 1.0
HF 1.0
H2O 1.0

CYLINDERS INFORMATION

CYLINDERS INFORMATION : TYPE, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 15 / 20 / 22.7 kg CGA/DISS640, CGA330,
JIS-22-14R/L etc.
Bundle Customized
Y-CYLINDER Cr-Mo Steel 195 / 200 kg CGA/DISS640 etc.
ISO Container 20ft 4,200 kg
40ft 8,000 kg
CYLINDERS INFORMATION : 47L, SPECIFICATIO
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 15 / 20 / 22.7 kg
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
CYLINDERS INFORMATION : Bundle, SPECIFICATIO
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
CYLINDERS INFORMATION : Y-CYLINDER, SPECIFICATIO
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 195 / 200 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
CYLINDERS INFORMATION : ISO Container, SPECIFICATIO
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 4,200 kg
40ft 8,000 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
Purpose of use - Wafer, Glass → Substrate In (Wafer, Chamber, Heater) → Processing (Process gases) Zoom In - Semiconductor (Dielectric), Display (Passivation) → Substrate Out (It is used when forming Si insulating films and Si anti-reflection coating.) → Cleaning (NF3 - NF3 is used during the manufacturing process of semiconductor, display and PV, as it removes residues from inner wall of the chamber after CVD manufacturing process.) → Semiconductor (Wafer), Display (Glass)