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Monosilane (SiH4)

SiH4 is used during the manufacturing process of semiconductor, display and PV,
where it is employed for Si insulator film and Si anti-reflection layer deposition.

  • ISO CONTAINER
  • Y-CYLINDER
  • BUNDLE
  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
SPECIFICATION : SiH4, O2+Ar, N2, H2, CO, CO2, CH4, H2O
SiH4 O2+Ar N2 H2 CO CO2 CH4 H2O
99.9999%
[Excluded H2]
1.0 1.0 20.0 0.1 0.1 0.1 1.0
SPECIFICATION : SiH4, SPECIFICATIO
SiH4 SPECIFICATIO
Purity SiH4 99.9999%
[Excluded H2]
Impurity
(ppmv)
O2+Ar 1.0
N2 1.0
H2 20.0
CO 0.1
CO2 0.1
CH4 0.1
H20 0.1

CYLINDERS INFORMATION

CYLINDERS INFORMATION : TYPE, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 10 / 12 kg CGA/DISS632, CGA350,
JIS-22-14L etc.
Bundle Customized CGA/DISS632, JIS-22-14L etc.
Y-CYLINDER Cr-Mo Steel 100 / 125 kg
ISO Container 20ft 2,200 kg CGA/DISS632 etc.
40ft 5,500 kg
CYLINDERS INFORMATION : 47L, SPECIFICATIO
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 10 / 12 kg
VALVE CONNECTION TYPE CGA/DISS632, CGA350, JIS-22-14L etc.
CYLINDERS INFORMATION : Bundle, SPECIFICATIO
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS632, JIS-22-14L etc.
CYLINDERS INFORMATION : Y-CYLINDER, SPECIFICATIO
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 100 / 125 kg
VALVE CONNECTION TYPE CGA/DISS632, JIS-22-14L etc.
CYLINDERS INFORMATION : ISO Container, SPECIFICATIO
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 2,200 kg
40ft 5,500 kg
VALVE CONNECTION TYPE CGA/DISS632 etc.
Purpose of use - Wafer, Glass → Substrate In (Wafer, Chamber, Heater) → Processing (Process gases) Zoom In - Semiconductor (Dielectric:SiH4), Display (Passivation:SiH4) SiH4:Dielectric - SiH4 is used during the manufacturing process of semiconductor, display and PV, where is employed for Si insulatorfilm and Si anti-reflection layer deposition. → Substrate Out → Semiconductor (Wafer), Display (Glass)