三氟化氮 (NF3)

三氟化氮适用于半导体、显示器及太阳能电池的制造工艺。在进行CVD工艺后,用于清洗Chamber内部的残留杂物。

  • ISO CONTAINER
  • Y-CYLINDER
  • BUNDLE
  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
NF3 O2+Ar N2 CF4 CO CO2 N2O SF6 HF H2O
99.999% 1.0 1.0 10.0 1.0 1.0 1.0 1.0 1.0 1.0
NF3 SPECIFICATIO
Purity NF3 99.999%
Impurity
(ppmv)
O2+Ar 1.0
N2 1.0
CF4 10.0
CO 1.0
CO2 1.0
N2O 1.0
SF6 1.0
HF 1.0
H2O 1.0

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 15 / 20 / 22.7 kg CGA/DISS640, CGA330,
JIS-22-14R/L etc.
Bundle Customized
Y-CYLINDER Cr-Mo Steel 195 / 200 kg CGA/DISS640 etc.
ISO Container 20ft 4,200 kg
40ft 8,000 kg
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 15 / 20 / 22.7 kg
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS640, CGA330, JIS-22-14R/L etc.
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 195 / 200 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 4,200 kg
40ft 8,000 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.