氯硅烷 (SiH3Cl)

氯硅烷(MCS) 是一种用于半导体及显示器制造工艺上的前驱体之原材料。

SPECIFICATION

Unit : %
SiH3Cl N2 SiH4 SiH2Cl2 SiHCl3 SiCl4 HCl
98.0 0.1 1.5 0.1 0.1 0.1 0.1
SiH3Cl SPECIFICATIO
Purity SiH3Cl 98.0
Impurity N2 0.1
SiH4 1.5
SiH2Cl2 0.1
SiHCl3 0.1
SiCl4 0.1
HCl 0.1

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel, Cr-Mo Steel 26 kg CGA/DISS636 etc.
47L SPECIFICATIO
MATERIAL Mn Steel, Cr-Mo Steel
FILLING WEIGHT 26 kg
VALVE CONNECTION TYPE CGA/DISS636 etc.